Equipment parts
Manufacturing
조인테크놀러지는 부품제작 및 리사이클 서비스를 완벽하게 수행할 수 있는 “전문 생산 시설 및 기술”을 보유하고 있습니다.
CAM 가공시스템을 구축하여 복잡한 형상의 제품을 정밀하게 가공하고, 안정적인 품질유지가 가능합니다.
CNC Machining center
CNC Turning center
CNC Rotary surface grinder
Surface grinder
Universal lathe, Milling machine
CDA(Clean and Dry Air) system
Parts cleaning system
Others
Plate aperture bernas A/C & Plate side bernas A/C
Base plate bernas A/C & Side plate bernas A/C
Threaded repeller
Cathode moly ELS/IAS & Cathode repeller
GSD ELS filament 0.040 inch
A/C Right plate & bottom plate
A/C Top end shield & bottom end shield
ARC Chamber & Lift pin
Filament bernas source & Clamp filament UPD
END Plate & Plate top
Special new type source head unit
PVD & Evaporator parts
Endura 6 pad Clamp ring with tap & wafer pin pedestal
Endura cover ring with tab
Endura upper & Lower shield & GEH Transfer blade
Endura cover & Pedestal & Bell jar shield
Novellus PVD, XM-90 process kit
PVD Gun housing
Special process kit
Temescal & Ulvac lift-off dome
Special dome & Wafer ring & Wafer cover
Crucible & Tungsten liner
Evaporator shield kit
CMP & BSG Machine parts
AEP Retainer ring (150 / 200mm)
AI Head retainer ring RE48
Assy pad backing riverted
Mirra membrane & Mirra CMP Inner tube ring
CMP Head tripod & Flexure gimbal
DBC Chuck roller & Sensor roller
Mirra CMP Head kit
Single porous chuck table (200 mm)
Thin wafer special porous chuck table
Tape & Detape porous chuck table
Robot end effector
Spinner table 150/200mm(C-type, U-type)
End effector 150/200mm(C-type, U-type)
Spin etcher parts
150 / 200 mm Spin chuck table unit
150 / 200 mm Bernoulli robot endeffector
200 / 300 mm Eccent pin diam
200 / 300 mm ESD Chuck pin
ECO Bernoulli gripper kit
Gripper short & Long pin
Holder dispenser
Elevator brake & Base block brake kit
Spin chuck pin cap & Chuck pin cap
ETC parts
Frame ring 200 mm
Topring mount bolt peek washer
Mounter VM wafer chuck pin
Demounter roller shaft assy
Demounter chuck table & Chuck support unit
Vespel tweezer pad
Mounter & Demounter process Kit
Work table & Run sheet storage
Safety protector storage box
Wafer moving cart
Detail view
Parts showroom
3D Measuring
Machinery for processing
